Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403267 | Method for high transmittance attenuated phase-shifting mask fabrication | San-De Tzu | 2002-06-11 |
WC
Wei-Zen Chen
Overall (2002): #93,569 of 266,432Top 40%
1
Patents 2002