Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451217 | Wafer etching method | Michihiko Yanagisawa, Shinya Iida, Yasuhiro Horiike | 2002-09-17 |
| 6360687 | Wafer flattening system | Michihiko Yanagisawa, Takeshi Sadohara, Shinya Iida, Yasuhiro Horiike | 2002-03-26 |