Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423285 | Method for producing silicon single crystal and production apparatus therefor, as well as single crystal and silicon wafer produced by the method | Kirio Itoi, Tohru Ishizuka, Tomohiko Ohta, Izumi Fusegawa | 2002-07-23 |
| 6364947 | Method and apparatus for manufacturing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers manufactured by the same | Makoto Iida, Masanori Kimura, Shozo Muraoka, Hideki Yamanaka | 2002-04-02 |
| 6348180 | Silicon single crystal wafer having few crystal defects | Makoto Iida, Satoshi Suzuki, Masanori Kimura, Shozo Muraoka | 2002-02-19 |
| 6340391 | Method for producing single crystal and pulling device | Kouji Kitagawa | 2002-01-22 |