Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6364947 | Method and apparatus for manufacturing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers manufactured by the same | Makoto Iida, Eiichi Iino, Masanori Kimura, Hideki Yamanaka | 2002-04-02 |
| 6348180 | Silicon single crystal wafer having few crystal defects | Makoto Iida, Satoshi Suzuki, Eiichi Iino, Masanori Kimura | 2002-02-19 |
| 6334896 | Single-crystal silicon wafer having few crystal defects and method for manufacturing the same | Makoto Iida, Masanori Kimura | 2002-01-01 |