Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423285 | Method for producing silicon single crystal and production apparatus therefor, as well as single crystal and silicon wafer produced by the method | Eiichi Iino, Tohru Ishizuka, Tomohiko Ohta, Izumi Fusegawa | 2002-07-23 |