Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423285 | Method for producing silicon single crystal and production apparatus therefor, as well as single crystal and silicon wafer produced by the method | Kirio Itoi, Eiichi Iino, Tohru Ishizuka, Tomohiko Ohta | 2002-07-23 |
| 6387466 | Single-crystal silicon wafer | Masakazu Sato | 2002-05-14 |