Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495449 | Multilayered diffusion barrier structure for improving adhesion property | — | 2002-12-17 |
| 6488272 | Liquid delivery system emulsifier | — | 2002-12-03 |
| 6444039 | Three-dimensional showerhead apparatus | — | 2002-09-03 |
| 6440219 | Replaceable shielding apparatus | — | 2002-08-27 |
| 6440878 | Method to enhance the adhesion of silicon nitride to low-k fluorinated amorphous carbon using a silicon carbide adhesion promoter layer | Hongning Yang | 2002-08-27 |
| 6355562 | Adhesion promotion method for CVD copper metallization in IC applications | Lawrence J. Charneski, Gautam Bhandari | 2002-03-12 |