Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440878 | Method to enhance the adhesion of silicon nitride to low-k fluorinated amorphous carbon using a silicon carbide adhesion promoter layer | Tue Nguyen | 2002-08-27 |
| 6410462 | Method of making low-K carbon doped silicon oxide | David R. Evans, Sheng Teng Hsu | 2002-06-25 |