Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472337 | Precursors for zirconium and hafnium oxide thin film deposition | Wei-Wei Zhuang | 2002-10-29 |
| 6410462 | Method of making low-K carbon doped silicon oxide | Hongning Yang, Sheng Teng Hsu | 2002-06-25 |