Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472337 | Precursors for zirconium and hafnium oxide thin film deposition | David R. Evans | 2002-10-29 |
| 6457479 | Method of metal oxide thin film cleaning | Fengyan Zhang, Sheng Teng Hsu, Tingkai Li | 2002-10-01 |
| 6441417 | Single c-axis PGO thin film on ZrO2 for non-volatile memory applications and methods of making the same | Fengyan Zhang, Yanjun Ma, Jer-Shen Maa, Sheng Teng Hsu | 2002-08-27 |
| 6420279 | Methods of using atomic layer deposition to deposit a high dielectric constant material on a substrate | Yoshi Ono, Rajendra Solanki | 2002-07-16 |
| 6372034 | PGO solutions for the preparation of PGO thin films via spin coating | Jer-Shen Maa, Fengyan Zhang, Sheng Teng Hsu | 2002-04-16 |