Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420279 | Methods of using atomic layer deposition to deposit a high dielectric constant material on a substrate | Yoshi Ono, Wei-Wei Zhuang | 2002-07-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420279 | Methods of using atomic layer deposition to deposit a high dielectric constant material on a substrate | Yoshi Ono, Wei-Wei Zhuang | 2002-07-16 |