Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488038 | Method for cleaning semiconductor substrates | Eric J. Bergman, Craig P. Meuchel | 2002-12-03 |
| 6357142 | Method and apparatus for high-pressure wafer processing and drying | Eric J. Bergman, Craig P. Meuchel, H. Frederick Woods | 2002-03-19 |