Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497768 | Process for treating a workpiece with hydrofluoric acid and ozone | — | 2002-12-24 |
| 6488038 | Method for cleaning semiconductor substrates | Craig P. Meuchel, Ian Sharp | 2002-12-03 |
| 6427359 | Systems and methods for processing workpieces | Dana Scranton, Eric Lund, Gil Lund | 2002-08-06 |
| 6401732 | Thermocapillary dryer | — | 2002-06-11 |
| 6357142 | Method and apparatus for high-pressure wafer processing and drying | Ian Sharp, Craig P. Meuchel, H. Frederick Woods | 2002-03-19 |