Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488038 | Method for cleaning semiconductor substrates | Eric J. Bergman, Ian Sharp | 2002-12-03 |
| 6375741 | Semiconductor processing spray coating apparatus | Timothy J. Reardon, Thomas H. Oberlitner | 2002-04-23 |
| 6357142 | Method and apparatus for high-pressure wafer processing and drying | Eric J. Bergman, Ian Sharp, H. Frederick Woods | 2002-03-19 |