Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6357142 | Method and apparatus for high-pressure wafer processing and drying | Eric J. Bergman, Ian Sharp, Craig P. Meuchel | 2002-03-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6357142 | Method and apparatus for high-pressure wafer processing and drying | Eric J. Bergman, Ian Sharp, Craig P. Meuchel | 2002-03-19 |