Issued Patents 2002
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500752 | Semiconductor device and semiconductor device manufacturing method | Taizo Oku, Junichi Aoki, Youichi Yamamoto, Takashi Koromokawa | 2002-12-31 |
| 6479409 | Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agent | Yoshimi Shioya, Kouichi Ohira, Tomomi Suzuki, Hiroshi Ikakura, Youichi Yamamoto +3 more | 2002-11-12 |
| 6479408 | Semiconductor device and method of manufacturing the same | Yoshimi Shioya, Kouichi Ohira | 2002-11-12 |
| 6472818 | Light bulb | Taku Ikeda | 2002-10-29 |
| 6472334 | Film forming method, semiconductor device manufacturing method, and semiconductor device | Hiroshi Ikakura, Tomomi Suzuki, Yoshimi Shioya, Kouichi Ohira | 2002-10-29 |
| 6435196 | Impurity processing apparatus and method for cleaning impurity processing apparatus | Noritada Satoh, Kouichi Ohira, Bunya Matsui | 2002-08-20 |
| 6432839 | Film forming method and manufacturing method of semiconductor device | Noboru Tokumasu, Yuki Ishii, Toshiro Nishiyama | 2002-08-13 |
| 6420276 | Semiconductor device and semiconductor device manufacturing method | Taizo Oku, Junichi Aoki, Youichi Yamamoto, Takashi Koromokawa | 2002-07-16 |
| 6413879 | Method for forming an interlayer insulating film, and semiconductor device | — | 2002-07-02 |
| 6403410 | Plasma doping system and plasma doping method | Kouichi Ohira, Bunya Matsui | 2002-06-11 |
| 6372670 | Method and apparatus for forming an interlayer insulating film, and semiconductor device | — | 2002-04-16 |
| 6352943 | Method of film formation and method for manufacturing semiconductor device | Yuhko Nishimoto | 2002-03-05 |
| 6336837 | Tungsten halogen lamp and method for manufacturing the same | — | 2002-01-08 |