Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479408 | Semiconductor device and method of manufacturing the same | Yoshimi Shioya, Kazuo Maeda | 2002-11-12 |
| 6479409 | Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agent | Yoshimi Shioya, Kazuo Maeda, Tomomi Suzuki, Hiroshi Ikakura, Youichi Yamamoto +3 more | 2002-11-12 |
| 6472334 | Film forming method, semiconductor device manufacturing method, and semiconductor device | Hiroshi Ikakura, Tomomi Suzuki, Kazuo Maeda, Yoshimi Shioya | 2002-10-29 |
| 6435196 | Impurity processing apparatus and method for cleaning impurity processing apparatus | Noritada Satoh, Bunya Matsui, Kazuo Maeda | 2002-08-20 |
| 6403410 | Plasma doping system and plasma doping method | Bunya Matsui, Kazuo Maeda | 2002-06-11 |
| 6334252 | Production of vehicles | Manabu Sato, Masato Takiguchi, Kouji Sato, Masami Tashiro, Takashi Matsuoka +2 more | 2002-01-01 |