Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435196 | Impurity processing apparatus and method for cleaning impurity processing apparatus | Noritada Satoh, Kouichi Ohira, Kazuo Maeda | 2002-08-20 |
| 6403410 | Plasma doping system and plasma doping method | Kouichi Ohira, Kazuo Maeda | 2002-06-11 |