Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472330 | Method for forming an interlayer insulating film, and semiconductor device | Toshio Kato, Makoto Kurotobi, Taizo Oku | 2002-10-29 |
| 6432839 | Film forming method and manufacturing method of semiconductor device | Kazuo Maeda, Yuki Ishii, Toshiro Nishiyama | 2002-08-13 |
| 6372650 | Method of cleaning substrate and method of manufacturing semiconductor device | Toshio Kato | 2002-04-16 |