Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479409 | Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agent | Yoshimi Shioya, Kouichi Ohira, Kazuo Maeda, Tomomi Suzuki, Hiroshi Ikakura +3 more | 2002-11-12 |
| 6472330 | Method for forming an interlayer insulating film, and semiconductor device | Toshio Kato, Noboru Tokumasu, Taizo Oku | 2002-10-29 |