Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499340 | Scanning probe microscope and method of measuring geometry of sample surface with scanning probe microscope | Akira Inoue, Akihiko Homma, Ryuichi Matsuzaki, Gerd Binnig, Walter Haeberle | 2002-12-31 |
| 6355495 | Method and apparatus for analyzing minute foreign substance, and process for semiconductor elements or liquid crystal elements by use thereof | Naohiko Fujino, Isamu Karino, Masahi Ohmori, Shigeru Wakiyama | 2002-03-12 |