Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493070 | Method for in-situ monitoring layer uniformity of sputter coating based on intensity distribution of plasma spectrum | Chuen-Horng Tsai, Jyh-Shin Chen, Ming-Hwu Cheng, Ho-Yen Hsiao, Py-Shiun Yeh +1 more | 2002-12-10 |
| 6466308 | Method for measuring a thermal expansion coefficient of a thin film by using phase shifting interferometry | Cheng-Chung Lee, Chuen-Lin Tien, Ing-Jer Ho | 2002-10-15 |