Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493070 | Method for in-situ monitoring layer uniformity of sputter coating based on intensity distribution of plasma spectrum | Cheng-Chung Jaing, Jyh-Shin Chen, Ming-Hwu Cheng, Ho-Yen Hsiao, Py-Shiun Yeh +1 more | 2002-12-10 |
| 6391515 | Manufacturing process for preparing sol-gel optical waveguides | Jung-Chieh Su, Chien-Kang Kao, I-Nan Lin, Cheng Chi, Yung S. Liu | 2002-05-21 |
| 6383554 | Process for fabricating plasma with feedback control on plasma density | Cheng-Hung Chang, Keh-Chyang Leou, Chaung Lin, Yi-Mei Yang, I. G. Chen | 2002-05-07 |