Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493070 | Method for in-situ monitoring layer uniformity of sputter coating based on intensity distribution of plasma spectrum | Cheng-Chung Jaing, Chuen-Horng Tsai, Jyh-Shin Chen, Ming-Hwu Cheng, Py-Shiun Yeh +1 more | 2002-12-10 |