Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6466308 | Method for measuring a thermal expansion coefficient of a thin film by using phase shifting interferometry | Cheng-Chung Jaing, Cheng-Chung Lee, Chuen-Lin Tien | 2002-10-15 |