Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489624 | Apparatus and methods for detecting thickness of a patterned layer | Takehiko Ueda, Eiji Matsukawa, Motoo Koyama | 2002-12-03 |
| 6458014 | Polishing body, polishing apparatus, polishing apparatus adjustment method, polished film thickness or polishing endpoint measurement method, and semiconductor device manufacturing method | Akira Ihsikawa, Tatsuya Senga, Akira Miyaji | 2002-10-01 |