Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489624 | Apparatus and methods for detecting thickness of a patterned layer | Yoshijiro Ushio, Takehiko Ueda, Motoo Koyama | 2002-12-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489624 | Apparatus and methods for detecting thickness of a patterned layer | Yoshijiro Ushio, Takehiko Ueda, Motoo Koyama | 2002-12-03 |