Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489624 | Apparatus and methods for detecting thickness of a patterned layer | Yoshijiro Ushio, Takehiko Ueda, Eiji Matsukawa | 2002-12-03 |
| 6339219 | Radiation imaging device and radiation detector | Tohru Ishizuya | 2002-01-15 |