Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492665 | Semiconductor device | Susumu Akamatsu, Toshitaka Hibi, Tadami Shimizu, Yoshiaki Kato, Tatsuya Obata +1 more | 2002-12-10 |
| 6489624 | Apparatus and methods for detecting thickness of a patterned layer | Yoshijiro Ushio, Eiji Matsukawa, Motoo Koyama | 2002-12-03 |