Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461447 | Substrate for epitaxial growth | Hiroshi Shinyashiki, Tomonori Yamaoka, Kazuhito Matsukawa, Yasuhiro Kimura, Hidekazu Yamamoto | 2002-10-08 |
| 6428619 | Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer | Hisashi Furuya, Yoji Suzuki, Yukio Muroi, Takaaki Shiota | 2002-08-06 |