Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491758 | CVD apparatus equipped with moisture monitoring | Hiroyuki Hasegawa, Hiroshi Masusaki, Takayuki Satou, Katsumasa Suzuki, Hiroki Tokunaga | 2002-12-10 |
| 6461447 | Substrate for epitaxial growth | Hiroshi Shinyashiki, Hiroshi Koya, Kazuhito Matsukawa, Yasuhiro Kimura, Hidekazu Yamamoto | 2002-10-08 |