Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491758 | CVD apparatus equipped with moisture monitoring | Hiroyuki Hasegawa, Tomonori Yamaoka, Takayuki Satou, Katsumasa Suzuki, Hiroki Tokunaga | 2002-12-10 |
| 6483589 | Laser spectroscopy system | Katsumasa Suzuki, Takayuki Satoh | 2002-11-19 |