Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428619 | Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer | Hiroshi Koya, Hisashi Furuya, Yoji Suzuki, Yukio Muroi | 2002-08-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428619 | Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer | Hiroshi Koya, Hisashi Furuya, Yoji Suzuki, Yukio Muroi | 2002-08-06 |