Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428619 | Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer | Hiroshi Koya, Yoji Suzuki, Yukio Muroi, Takaaki Shiota | 2002-08-06 |
| 6379460 | Thermal shield device and crystal-pulling apparatus using the same | Kazuhiro Harada, Yoji Suzuki, Senlin Fu | 2002-04-30 |