Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447937 | Ceramic materials resistant to halogen plasma and components using the same | Shunichi Murakawa, Yumiko Itoh, Hiroshi Aida, Tetsuzi Hayasaki | 2002-09-10 |
| 6445012 | Semiconductor device and manufacturing method thereof | Tetsuo Takahashi, Tadaharu Minato, Masana Harada | 2002-09-03 |
| 6364005 | Integral-type heat exchanger | Kenji Makino, Hiroyasu Koizumi, Minoru Tsuchiya, Kunio Matsugi, Hiroshi Chikuma +7 more | 2002-04-02 |