Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6445012 | Semiconductor device and manufacturing method thereof | Katsumi Nakamura, Tadaharu Minato, Masana Harada | 2002-09-03 |
| 6397656 | System and method for detecting liquid serving as object to be detected in vessel using ultrasonic sensor | Hirotaro Yamaguchi, Osamu Suzuki, Yukio Katagishi, Huaigang Zang, Hidetaka Kizaki +1 more | 2002-06-04 |
| 6362926 | Projection exposure apparatus and method | Yasuhiro Omura, Yutaka Ichihara | 2002-03-26 |