Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6473243 | Catadioptric imaging system and a projection exposure apparatus provided with said imaging system | — | 2002-10-29 |
| 6466303 | Projection exposure apparatus with a catadioptric projection optical system | Toshihiko Ozawa, Takashi Mori, Hideki Komatsuda | 2002-10-15 |
| 6451507 | Exposure apparatus and method | Yutaka Suenaga | 2002-09-17 |
| 6452723 | Exposure apparatus and method | Yutaka Suenaga | 2002-09-17 |
| 6362926 | Projection exposure apparatus and method | Yutaka Ichihara, Tetsuo Takahashi | 2002-03-26 |