Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447937 | Ceramic materials resistant to halogen plasma and components using the same | Yumiko Itoh, Hiroshi Aida, Katsumi Nakamura, Tetsuzi Hayasaki | 2002-09-10 |
SM
Shunichi Murakawa
Overall (2002): #117,778 of 266,432Top 45%
1
Patents 2002