Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447937 | Ceramic materials resistant to halogen plasma and components using the same | Shunichi Murakawa, Hiroshi Aida, Katsumi Nakamura, Tetsuzi Hayasaki | 2002-09-10 |
| 6383964 | Ceramic member resistant to halogen-plasma corrosion | Masahiro Nakahara | 2002-05-07 |