Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6456010 | Discharge plasma generating method, discharge plasma generating apparatus, semiconductor device fabrication method, and semiconductor device fabrication apparatus | Koji Satake, Yoshiaki Takeuchi, Hiroshi Mashima, Tatsufumi Aoi, Masayoshi Murata | 2002-09-24 |
| 6417079 | Discharge electrode, high-frequency plasma generator, method of power feeding, and method of manufacturing semiconductor device | Koji Satake, Minoru Danno | 2002-07-09 |
| 6353201 | Discharge electrode, RF plasma generation apparatus using the same, and power supply method | Kengou Yamaguchi, Masayoshi Murata, Yoshiaki Takeuchi, Yoshikazu Nawata, Koji Satake +5 more | 2002-03-05 |