Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6353201 | Discharge electrode, RF plasma generation apparatus using the same, and power supply method | Hideo Yamakoshi, Kengou Yamaguchi, Masayoshi Murata, Yoshiaki Takeuchi, Koji Satake +5 more | 2002-03-05 |