Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6456010 | Discharge plasma generating method, discharge plasma generating apparatus, semiconductor device fabrication method, and semiconductor device fabrication apparatus | Hideo Yamakoshi, Koji Satake, Yoshiaki Takeuchi, Tatsufumi Aoi, Masayoshi Murata | 2002-09-24 |
| 6441977 | Optical apparatus with optical system having long optical path | — | 2002-08-27 |
| 6363881 | Plasma chemical vapor deposition apparatus | Masayoshi Murata, Yoshiaki Takeuchi, Akemi Takano, Hirohisa Yoshida | 2002-04-02 |
| 6353201 | Discharge electrode, RF plasma generation apparatus using the same, and power supply method | Hideo Yamakoshi, Kengou Yamaguchi, Masayoshi Murata, Yoshiaki Takeuchi, Yoshikazu Nawata +5 more | 2002-03-05 |