Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6417079 | Discharge electrode, high-frequency plasma generator, method of power feeding, and method of manufacturing semiconductor device | Hideo Yamakoshi, Koji Satake | 2002-07-09 |
| 6340863 | Microwave plasma generator and system for decomposing organic halide | Tetsuya Ikeda | 2002-01-22 |