Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492731 | Composite low dielectric constant film for integrated circuit structure | Wilbur G. Catabay, Kai Zhang | 2002-12-10 |
| 6423628 | Method of forming integrated circuit structure having low dielectric constant material and having silicon oxynitride caps over closely spaced apart metal lines | Weidan Li, Wilbur G. Catabay | 2002-07-23 |
| 6423630 | Process for forming low K dielectric material between metal lines | Wilbur G. Catabay, Dung-Ching Perng | 2002-07-23 |
| 6420277 | Process for inhibiting crack formation in low dielectric constant dielectric films of integrated circuit structure | Wilbur G. Catabay, Hong Qiang | 2002-07-16 |
| 6346490 | Process for treating damaged surfaces of low k carbon doped silicon oxide dielectric material after plasma etching and plasma cleaning steps | Wilbur G. Catabay, Alex Kabansky | 2002-02-12 |