Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495479 | Simplified method to produce nanoporous silicon-based films | James Drage, Lisa Brungardt, Teresa Ramos, Douglas M. Smith | 2002-12-17 |
| 6495906 | Simplified process for producing nanoporous silica | Douglas M. Smith, Teresa Ramos, Kevin Roderick, Stephen Wallace, James Drage +2 more | 2002-12-17 |
| 6489030 | Low dielectric constant films used as copper diffusion barrier | James Drage | 2002-12-03 |
| 6395649 | Low dielectric constant polyorganosilicon coatings generated from polycarbosilanes | — | 2002-05-28 |
| 6395651 | Simplified process for producing nanoporous silica | Douglas M. Smith, Teresa Ramos, Kevin Roderick, Stephen Wallace, James Drage +2 more | 2002-05-28 |
| 6368400 | Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography | Teresa Baldwin, Mary Richey, James Drage, Richard Spear | 2002-04-09 |