Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495906 | Simplified process for producing nanoporous silica | Douglas M. Smith, Kevin Roderick, Stephen Wallace, James Drage, Hui-Jung Wu +2 more | 2002-12-17 |
| 6495479 | Simplified method to produce nanoporous silicon-based films | Hui-Jung Wu, James Drage, Lisa Brungardt, Douglas M. Smith | 2002-12-17 |
| 6455130 | Nanoporous dielectric films with graded density and process for making such films | Stephen Wallace, Douglas M. Smith, Kevin Roderick, James Drage | 2002-09-24 |
| 6410149 | Silane-based nanoporous silica thin films and precursors for making same | Neil H. Hendricks, Douglas M. Smith, Stephen Wallace, James Drage | 2002-06-25 |
| 6395651 | Simplified process for producing nanoporous silica | Douglas M. Smith, Kevin Roderick, Stephen Wallace, James Drage, Hui-Jung Wu +2 more | 2002-05-28 |
| 6380105 | Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates | Douglas M. Smith, Gregory P. Johnston, William C. Ackerman, Richard Stoltz, Alok Maskara +2 more | 2002-04-30 |
| 6372666 | Process for producing dielectric thin films | Douglas M. Smith, James Drage, Rick J. Roberts | 2002-04-16 |
| 6335296 | Deposition of nanoporous silica films using a closed cup coater | Neil H. Hendricks, Douglas M. Smith, James Drage | 2002-01-01 |