Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495906 | Simplified process for producing nanoporous silica | Douglas M. Smith, Teresa Ramos, Kevin Roderick, Stephen Wallace, Hui-Jung Wu +2 more | 2002-12-17 |
| 6495479 | Simplified method to produce nanoporous silicon-based films | Hui-Jung Wu, Lisa Brungardt, Teresa Ramos, Douglas M. Smith | 2002-12-17 |
| 6489030 | Low dielectric constant films used as copper diffusion barrier | Hui-Jung Wu | 2002-12-03 |
| 6455130 | Nanoporous dielectric films with graded density and process for making such films | Stephen Wallace, Douglas M. Smith, Teresa Ramos, Kevin Roderick | 2002-09-24 |
| 6410149 | Silane-based nanoporous silica thin films and precursors for making same | Neil H. Hendricks, Douglas M. Smith, Teresa Ramos, Stephen Wallace | 2002-06-25 |
| 6395651 | Simplified process for producing nanoporous silica | Douglas M. Smith, Teresa Ramos, Kevin Roderick, Stephen Wallace, Hui-Jung Wu +2 more | 2002-05-28 |
| 6372666 | Process for producing dielectric thin films | Teresa Ramos, Douglas M. Smith, Rick J. Roberts | 2002-04-16 |
| 6368400 | Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography | Teresa Baldwin, Mary Richey, Hui-Jung Wu, Richard Spear | 2002-04-09 |
| 6335296 | Deposition of nanoporous silica films using a closed cup coater | Neil H. Hendricks, Douglas M. Smith, Teresa Ramos | 2002-01-01 |