Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368400 | Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography | Mary Richey, James Drage, Hui-Jung Wu, Richard Spear | 2002-04-09 |
| 6365765 | Spin-on-glass anti-reflective coatings for photolithography | Nigel Hacker, Joseph Kennedy, Richard Spear | 2002-04-02 |