Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472076 | Deposition of organosilsesquioxane films | — | 2002-10-29 |
| 6444495 | Dielectric films for narrow gap-fill applications | Roger Leung, Denis Endisch, Songyuan Xie, Yanpei Deng | 2002-09-03 |
| 6440550 | Deposition of fluorosilsesquioxane films | — | 2002-08-27 |
| 6365765 | Spin-on-glass anti-reflective coatings for photolithography | Teresa Baldwin, Joseph Kennedy, Richard Spear | 2002-04-02 |
| 6361820 | Dielectric films from organohydridosiloxane resins with high organic content | Scott Lefferts, Lisa Figge, Michael D. Slessor | 2002-03-26 |
| 6358559 | Dielectric films from organohydridosiloxane resins with low organic content | Scott Lefferts, Lisa Figge, Michael D. Slessor | 2002-03-19 |
| 6359099 | Organohydridosiloxane resins with low organic content | Scott Lefferts, Lisa Figge | 2002-03-19 |