Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6433297 | Plasma processing method and plasma processing apparatus | Akihiro Kojima | 2002-08-13 |
| 6420271 | Method of forming a pattern | Yasuhiko Sato, Eishi Shiobara, Motoyuki Sato, Yasunobu Onishi, Hiroshi Tomita +2 more | 2002-07-16 |
| 6369423 | Semiconductor device with a thin gate stack having a plurality of insulating layers | Jeffrey P. Gambino, Katsuya Okumura, Jun-ichi Shiozawa | 2002-04-09 |